MEMS Engineering Services...

Micro-Electro-Mechanical Systems (MEMS)

Our experience in MEMS goes back to 1981 when Tom Roberts, our CEO, completed the electro-mechanical design of the first integrated MEMS product to gain wide spread acceptance as a commercially sold OEM Product. The GC was an out growth of a silicon micromachining R&D project featured on the cover of the April 1983 issue of Scientific American Magazine.

MEMS, Product Design:

SMP Tech, Inc.'s engineering specializes in the methodology of product development. It is recognized that few products justify long, expensive programs of investigation. Most product-related problems which manufacturers face have been encountered at another time and place, in another industry. This is also true when designing products based on microelectromechanical systems.

What is Microengineering?

Microengineering refers to the technologies and practice of making three dimensional structures and devices with dimensions in the order of micrometers. The physical effects of mechanical structures are significantly different in MEMS devices when compared to macroscopic devices.


Microelectronics is producing electronic circuitry on silicon chips and is a very well developed technology. MEMS devices are mass-produced using batch-fabricated methods used in the semiconductor industry.


Micromachining is the name for the techniques used to produce the structures and moving parts of microengineered devices. The goal of the MEMS industry is to integrate microelectronic circuitry into micromachined structures, to produce completely integrated systems. Such systems would have the same advantages of low cost, reliability and small size as silicon chips produced in the microelectronics industry.


Photolithography is the basic technique used to define the shape of micromachined structures. The technique is essentially the same as that used in the microelectronics industry.

Micromachining Techniques:

Micromachining is the most prominent MEMS technique. Silicon is the primary substrate material used in the production microelectronic circuitry. Therefore, it is the most suitable candidate for the eventual production of microsystems.


LIGA is a technique that can be used to produce molds for the fabrication of micromachined components. Microengineered components can be made from a variety of materials using this technique. However, it does require an X-ray source from a synchrotron. LIGA, a German acronym that stands for Lithographic Galvonoformung Abformung, (or lithography, electroplating, molding) is a high aspect ratio (height : width) MEMS technology with many promising applications. LIGA allows the use of materials such as metals and plastics -- opening the door for many different types of structures and devices.

LIGA allows tiny parts and structures to be created with very high precision using batch fabrication methods. LIGA structures typically have an aspect ratio of greater than 10 to 1, very precise geometries, and smooth, vertical sidewalls.

Interesting MEMS Links:

News Letters and Organizations

MEMS TechNet and MUMPs email Newsletter:

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MEMS Bay Area Journal Club:

The Bay Area MEMS Journal Club is an informal forum for professionals with an interest in the MEMS field. Meetings are held in the evening on the first Wednesday of each month and typically follow an open-discussion format in which group participation is encouraged. Topics span from fabrication technologies to applications of MEMS. If you are interested in leading a discussion, or would like to know more about MEMS Contact: Rolfe Anderson at 650-210-1206,


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For Additional Information Contact SMP Tech, Inc. at:    

Phone: 408.776.7776